Universal non-contact surface analyzer
Taylor Hobson - CCI MP
The CCI MP non-contact 3D surface measurement and analysis system is a popular line for polished surface measurement applications up to
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Technical Description
- High resolution up to 1048 x 1048 pixels with wide viewing angle
- Image stitching technology up to 100mm for X, Y and Z axes
- Effective repeatability (RMS) <0.2 Å, Repeatability across samples <0.1%
- Resolution up to Å over the entire measuring range
- Multilingual 64-bit Windows analysis and control software
Specifications
| Overview | |
| System | |
| Measurement type | 3D non-contact |
| Measurement mode | Coherence Correlation Interferometry (CCI) |
| Z scanner | Ultra high precision closed loop piezoless scanner |
| Objective mount | 3 position turret |
| X/Y Stage | Automatic |
| Z stage | Automatic |
| Performance | |
| Single scan range (Z) | 2.2 mm as standard (closed loop) |
| Z-stitching range | Up to the working distance of the lens (current maximum is 40 mm) |
| Z-resolution (max) | 0.01 nm |
| Noise floor (Z) | <0.08 nm="" 0="" 8="" span=""> |
| Repeatability of surface RMS | <0.01 nm="" 0="" 1="" span=""> |
| Number of measurement points | 1024 x 1024 |
| Step height repeatability | <0.02% |
| Surface reflectivity | <0.34 % - 100% |
