Taylor Hobson - CCI HD

High Resolution Surface Analyzer

Taylor Hobson - CCI HD

Designed for use in manufacturing and research facilities, the CCI HD can measure thicknesses as thin as 1.5 microns and analyze coatings down to 50nm.

Technical Description

  • High resolution up to 2048 x 2048 pixels with wide viewing angle
  • Resolution 0.1 Å for entire measurement range
  • Measure on reflective surfaces from 0.3% to 100% easily
  • Effective repeatability (RMS) <0.2 Å, Repeatability across samples <0.1%
  • Multilingual 64-bit Windows analysis and control software

Specifications

Overview
System
Measurement type3D non-contact
Measurement modeCoherence Correlation Interferometry (CCI)
Z scannerUltra high precision closed loop piezoless scanner
Objective mount3 position turret
X/Y StageAutomatic
Z stageAutomatic
Performance
Single scan range (Z)2.2 mm as standard (closed loop)
Z-stitching rangeUp to the working distance of the lens (current maximum is 40 mm)
Z-resolution (max)0.01 nm
Noise floor (Z)<0.02 nm [0.2 Å]
Repeatability of surface RMS<0.01 nm [0.1 Å]
Number of measurement points2048 x 2048
Step height repeatability< 0.02 %
Surface reflectivity< 0.34 % - 100 %

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