
High Resolution Surface Analyzer
Taylor Hobson - CCI HD
Designed for use in manufacturing and research facilities, the CCI HD can measure thicknesses as thin as 1.5 microns and analyze coatings down to 50nm.
Gọi (+84) 828 31 08 99 để được tư vấn.
Technical Description
- High resolution up to 2048 x 2048 pixels with wide viewing angle
- Resolution 0.1 Å for entire measurement range
- Measure on reflective surfaces from 0.3% to 100% easily
- Effective repeatability (RMS) <0.2 Å, Repeatability across samples <0.1%
- Multilingual 64-bit Windows analysis and control software
Specifications
Overview | |
System | |
Measurement type | 3D non-contact |
Measurement mode | Coherence Correlation Interferometry (CCI) |
Z scanner | Ultra high precision closed loop piezoless scanner |
Objective mount | 3 position turret |
X/Y Stage | Automatic |
Z stage | Automatic |
Performance | |
Single scan range (Z) | 2.2 mm as standard (closed loop) |
Z-stitching range | Up to the working distance of the lens (current maximum is 40 mm) |
Z-resolution (max) | 0.01 nm |
Noise floor (Z) | <0.02 nm [0.2 Å] |
Repeatability of surface RMS | <0.01 nm [0.1 Å] |
Number of measurement points | 2048 x 2048 |
Step height repeatability | < 0.02 % |
Surface reflectivity | < 0.34 % - 100 % |