High Speed Surface Analyzer
Taylor Hobson - CCI MP-HS
Ideal for research, the CCI MP-HS measures all surface parameters from very rough to very glossy, providing flexible measurement capabilities...
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Technical Description
- High resolution up to 1048 x 1048 pixels with wide viewing angle
- Advanced image stitching technology for X, Y and Z axes, expanding measurement range
- Effective repeatability (RMS) < 0.2 Å, Repeatability on step sample < 0.1%
- Integrated anti-vibration table, minimizes noise signals, optimizes system performance
- Multilingual 64-bit Windows analysis and control software
Specifications
| Overview | |
| System | |
| Measurement type | 3D non-contact |
| Measurement mode | Coherence Correlation Interferometry (CCI) |
| Z scanner | Ultra high precision closed loop piezoless scanner |
| Objective mount | 3 position turret |
| X/Y Stage | Automatic |
| Z stage | Automatic |
| Performance | |
| Single scan range (Z) | 2.2 mm as standard (closed loop) |
| Z-stitching range | Up to the working distance of the lens (current maximum is 40 mm) |
| Z-resolution (max) | 0.01 nm |
| Noise floor (Z) | <0.05 nm [0.5 Å] |
| Repeatability of surface RMS | <0.01 nm [0.1 Å] |
| Number of measurement points | 1024 x 1024 |
| Step height repeatability | < 0.02 % |
| Surface reflectivity | <0.34 % - 100% |
