Optical Glass Profile Deviation Measuring Machine
Taylor Hobson - Luphos series
LuphoScan is an interferometric scanning system based on MWLI® (multi-wavelength interference) technology.
Gọi (+84) 828 31 08 99 để được tư vấn.
Technical Description
- Use on any symmetrical surface
- High precision
- Measures on all materials: transparent glass, reflective mirrors, frosted mirrors, polished surfaces, rough surfaces
- Fast measurement speed
- Sample diameter: optional up to 120mm, 260mm or 420mm
Specifications
| Overview | |||
| Measurement system | |||
| Models | LuphoScan 120 | LuphoScan 260 | LuphoScan 420 |
| Machine type | 4-axis (3 mechanical bearings, 1 air bearing) | ||
| Measurement principle | Scanning point interferometry | ||
| Sensor technology | Fibre optics based multi-wavelength interferometer (MWLI® ) | ||
| Scanning mode (3D) | Spiral, equidistant, normal | ||
| Measurement volume (diameter x height) | 120 mm x 75 mm | 260 mm x 75 mm | 420 mm x 100 mm |
| Maximum tilt | 90° | ||
| Reference system | 3 MWLI® sensors | ||
| Invar frame | |||
| 1st order R, Z, T axis error compensation | |||
| Object parameters | |||
| Surface shapes | Aspheric, spheric, flat, slight freeform | ||
| Surface finish | Polished, rough, transparent, specular, opaque | ||
| Reflectivity range | 0,5 % ... 100 % | ||
| Spherical departure | Unrestricted (object sensor follows ideal profile) | ||
| Maximal diameter with 90° slope | 25 mm | 75 mm | 105 mm |
| Maximum object diameter | 120 mm | 260 mm | 420 mm |
| Maximum object weigh | 15 kg | 25 kg | 50 kg |
| Machine characteristics | |||
| Object mount | Hydraulic expansion chuck (HD25 or HD40), optional: 3-jaw chuck (D = 22…200 mm) | ||
| Internal data rate | 2500 Hz | ||
| Wavelength range | 1530 nm ... 1610 nm | ||
| Laser classification | Class 1 | ||
| Continuous wave output (CW), < 1 mW | |||
| Machine dimensions (w x d x h) | 70 cm x 85 cm x 186 cm | 85 cm x 100 cm x 186 cm | 100 cm x 115 cm x 186 cm |
| Machine weight | 325 kg | 450 kg | 600 kg |
| Compressed air requirement | 6..10 bar, 20 litre/min | ||
| Electrical power requirement | 230 VAC, 50/60 Hz, < 700 W | ||
| Measurement characteristics | |||
| Accuracy (2σ) | polished | Ra < 1 μm | 1 μm ≤ Ra ≤ 3 μm |
| (angle of incidence ≤ ± 1°) | |||
| ± 50 nm | ± 250 nm | ± 1 μm | |
| Longitudinal resolution | 0.1 nm | ||
| Spotsize | 4 μm | ||
| Lateral resolution (points per mm2) | (adjustable:) 0.1 ... 2×105 | ||
| Data handling | |||
| Parameter input | Aspheric coefficients (even, uneven) | ||
| Measurement data | 3D, 2D linescan | ||
| Data export formats | 3D | Zygo MetroPro XYZ, | |
| X,Y,Z,dN (ASCII, binary), X,Y,Z,dZ (ASCII, binary) | |||
| 2D | Taylor Hobson MOD, Taylor Hobson PRF, | ||
| X,Z,dN (ASCII, binary), X,Z,dZ (ASCII, binary) | |||
| Data analysis | 3D surface visualisation, adjustable cross-section, 2D graphics, | ||
| filtering (LPF, HPF, Gaussian), best-fit radius, aspheric fit, PV, | |||
| RMS, tangential & radial errors, measurement report (PDF) | |||
